Defect Detection and characterization

Defects locally change the crystal structure. Such change influences the wavelength and intensity of the CL signal. This makes CL is an appealing method for non-destructive high resolution defect detection and characterization.

Examples:

Composition metrology

Changes in material composition directly influence the CL emission wavelength and intensity. CL is thus a very convenient way of mapping compositional fluctuations at the nanometer scale.

Examples:

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Doping metrology

Different dopants and doping concentrations in semiconductors change the CL emission. This makes CL a powerful method for doping metrology on a variety of materials such as silicon, gallium nitride compounds and others.

Examples:

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Failure Analysis

CL maps of failed or aged devices often show spectral and intensity changes as compared to a reference device. This makes CL a very useful method to localise and identify failure or ageing mechanisms.

Examples:

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Nanostructure characterization

CL is an excitation spectroscopy method that can access optical information far below the optical diffraction limit. This makes it an ideal method to assess optical properties of nanostructures and for nanophotonics experiments.

Examples:

Carrier dynamics (picosecond time resolved CL) & dynamic SEM

Picosecond time resolved CL (psTRCL) allows to measure carrier dynamics with picosecond time and nanometer spatial resolutions. Energy transfer processes and variations of radiative and non-radiative lifetimes can be directly measured.
In addition, Attolight’s psTRCL system is a dynamic SEM that allows to carry out advanced pump and probe experiments at the same time.

Examples:

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Biological imaging

Fluorescence imaging is a well established method in biological imaging. Dyes or proteins are used as labels for molecular processes or structures. Electron beam stable labels are being developed that also exhibit well defined CL emission lines.
This makes the identification and imaging of molecular processes at nanometer resolution possible.

Examples:

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